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Semiconductor
Integrated control supports wafer carrier transport and tool loading in precision semiconductor manufacturing.
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Semiconductors
Mobile manipulators transport wafer carriers and load and unload process equipment in semiconductor production. Integrated control of the AGV chassis, collaborative arm and vision system enables efficient automation.
Customer applications
Applications
Wafer carrier transport
Laser navigation enables autonomous movement in cleanrooms and precise docking with EFEMs, stockers and other equipment to move wafer carriers between zones while avoiding contamination from manual handling.
Machine loading and unloading
Accurate arm positioning automates wafer carrier loading and unloading at process equipment such as lithography and etching machines, with protocol compatibility across multiple equipment brands.
Key benefits
Higher efficiency
24-hour operation; transport efficiency improvement50%Machine utilization improvement20%
Digital production
IoT interfaces provide material traceability and equipment monitoring to support a closed-loop digital production process.
Less contamination and damage
Cleanroom operation and precise handling reduce particle contamination and physical damage.
Flexible adaptation
Dynamic route planning and modular designs accommodate production line changes and different wafer sizes.